融合CFDP和CPM分析的关键核心技术识别及其路径分析——以芯片光刻领域为例
吕鲲, 罗星雨, 靖继鹏
Identification and Path Analysis of Key Core Technologies Integrated CFDP and CPM Analysis: A Case Study of Chip Lithography
Lü Kun, Luo Xingyu, Jing Jipeng
图书情报工作
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2024, (16): 75
-89
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DOI: 10.13266/j.issn.0252-3116.2024.16.007
